Techniques for mechanical strain analysis in sub-micrometer structures: TEM/CBED, micro-Raman spectroscopy, X-ray micro-diffraction and modeling

Authors: De Wolf I., Senez V., Balboni R., Armigliato A., Frabboni S., Cedola A., Lagomarsino S.
Years: 2003
Source Title: Microelectronic Engineering
Doi: 10.1016/S0167-9317(03)00372-1
Venue: S.Li.M. Lab @ Roma