RF plasma deposition of SiO2-like films: Plasma phase diagnostics and gas barrier film properties optimisation

Authors: Creatore M., Palumbo F., D’Agostino R., Fayet P.
Years: 2001
Source Title:
Doi: 10.1016/S0257-8972(01)01095-7
Venue: NanoChem @ URT Bari