RF plasma deposition of PEO-like films: Diagnostics and process control
RF plasma deposition of PEO-like films: Diagnostics and process control
Authors: Palumbo F., Favia P., Vulpio M., D’Agostino R.
Years: 2001
Source Title: Doi:10.1023/A:1013144612953 Venue: NanoChem @ URT Bari
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