Nickel-affected silicon crystallization and silicidation on polyimide by multipulse excimer laser annealing

Authors: Alberti A., La Magna A., Cuscun M., Fortunato G., Spinella C., Privitera V.
Years: 2010
Source Title: Journal of Applied Physics
Doi: 10.1063/1.3531562
Venue: CNR Nanotec @ Lecce