Nanostructure and composition control of fluorocarbon films from modulated tetrafluoroethylene plasmas

Authors: Cicala G., Milella A., Palumbo F., Rossini P., Favia P., D’Agostino R.
Years: 2002
Source Title:
Doi: 10.1021/ma025536e
Venue: NanoChem @ URT Bari