Nano-island fabrication by electron beam lithography and selective oxidation of Al-rich AlGaAs layers for single electron device application

Authors: De Vittorio M., Todaro M.T., Vitale V., Passaseo A., Johal T.K., Rinaldi R., Cingolani R., Bernardi S.
Years: 2002
Source Title: Microelectronic Engineering
Doi: 10.1016/S0167-9317(02)00546-4
Venue: CNR Nanotec @ Lecce