Integration of melting excimer laser annealing in power MOS technology

Authors: Privitera V., La Magna A., Spinella C., Fortunato G., Mariucci L., Cuscuna M., Camalleri C.M., Magri A., La Rosa G., Svensson B.G., Monakhov E.V., Simon F.
Years: 2007
Source Title: IEEE Transactions on Electron Devices
Doi: 10.1109/TED.2007.892011
Venue: CNR Nanotec @ Lecce