Influence of PECVD parameters on the properties of diamond-like carbon films

Authors: Caschera D., Cossari P., Federici F., Kaciulis S., Mezzi A., Padeletti G., Trucchi D.M.
Years: 2011
Source Title: Thin Solid Films
Doi: 10.1016/j.tsf.2011.01.197
Venue: CNR Nanotec @ Lecce