Deposition and characterization of dielectric thin films from allyltrimethylsilane glow discharges

Authors: Milella A., Palumbo F., Delattre J.L., Fracassi F., d’Agostino R.
Years: 2007
Source Title:
Doi: 10.1002/ppap.200600186
Venue: NanoChem @ URT Bari