Defect generation and evolution in laser processing of Si

Authors: La Magna A., Privitera V., Mannino G., Fortunato G., Cuscuna M., Svensson B.G., Monakhov E., Kuitunen K., Slotte J., Tuomisto F.
Years: 2007
Source Title: 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007
Doi: 10.1109/RTP.2007.4383849
Venue: CNR Nanotec @ Lecce