A novel fabrication process for polysilicon thin film transistors with source/drain contacts formed by deposition and lift-off of highly doped layers

Authors: Cuscuna M., Bonfiglietti A., Carluccio R., Mariucci L., Mecarini F., Pecora A., Stanizzi M., Valletta A., Fortunato G.
Years: 2002
Source Title: Solid-State Electronics
Doi: 10.1016/S0038-1101(02)00082-5
Venue: CNR Nanotec @ Lecce