A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures

Authors: Todaro M.T., Sileo L., Epifani G., Tasco V., Cingolani R., De Vittorio M., Passaseo A.
Years: 2010
Source Title: Journal of Micromechanics and Microengineering
Doi: 10.1088/0960-1317/20/10/105013
Venue: CNR Nanotec @ Lecce