X-ray nano-diffraction: 100 nm resolution obtained in a novel imaging technique for strain measurement at buried interfaces

Authors: Lagomarsino S., Di Fonzo S., Jark W., Giannini C., De Caro L., Cedola A.
Years: 2000
Source Title: Microelectronic Engineering
Doi: 10.1016/S0167-9317(00)00396-8
Venue: S.Li.M. Lab @ Roma