Vertical synchrotron radiation beamline for proximity X-ray lithography: Theoretical analysis

Authors: Bukreeva I.N., Kozhevnikov I.V.
Years: 1997
Source Title: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Doi: 10.1016/S0168-9002(97)00671-2
Venue: S.Li.M. Lab @ Roma