Two-dimensional photonic crystal waveguide obtained by e-beam direct writing of SU8-2000 photoresist

Authors: De Vittorio M., Todaro M.T., Stomeo T., Cingolani R., Cojoc D., Di Fabrizio E.
Years: 2004
Source Title: Microelectronic Engineering
Doi: 10.1016/j.mee.2004.02.075
Venue: CNR Nanotec @ Lecce