Thin film deposition in capacitively coupled plasmas fed with bis(dimethylamino)-dimethylsilane and oxygen: An FTIR study

Authors: Mundo R.D., Palumbo F., Fracassi F., D’Agostino R.
Years: 2009
Source Title:
Doi: 10.1002/ppap.200800206
Venue: NanoChem @ URT Bari