Structural and piezoelectric properties of DC-sputtered AlN films deposited on different Si-based substrates

Authors: Ingrosso I., Tasco V., Altamura D., De Vittorio M., Passaseo A.
Years: 2009
Source Title: Ferroelectrics
Doi: 10.1080/00150190902987699
Venue: CNR Nanotec @ Lecce