Structural and optical investigation of plasma deposited silicon carbon alloys: Insights on Si-C bond configuration using spectroscopic ellipsometry

Authors: Losurdo M., Giangregorio M., Capezzuto P., Bruno G., Giorgis F.
Years: 2005
Source Title:
Doi: 10.1063/1.1899758
Venue: NanoChem @ URT Bari