Stress-driven AlN cantilever-based flow sensor for fish lateral line system

Authors: Qualtieri A., Rizzi F., Todaro M.T., Passaseo A., Cingolani R., De Vittorio M.
Years: 2011
Source Title: Microelectronic Engineering
Doi: 10.1016/j.mee.2011.02.091
Venue: CNR Nanotec @ Lecce