Single-chamber deposition of multilayer barriers by plasma enhanced and initiated chemical vapor deposition of organosilicones

Authors: Coclite A.M., Ozaydin-Ince G., Palumbo F., Milella A., Gleason K.K.
Years: 2010
Source Title:
Doi: 10.1002/ppap.200900139
Venue: NanoChem @ URT Bari