Role of oxygen on the electrical activation of B in Ge by excimer laser annealing

Authors: Impellizzeri G., Napolitani E., Milazzo R., Boninelli S., Cuscuna M., Fisicaro G., La Magna A., Fortunato G., Priolo F., Privitera V.
Years: 2014
Source Title: Physica Status Solidi (A) Applications and Materials Science
Doi: 10.1002/pssa.201300308
Venue: CNR Nanotec @ Lecce