Rigid organic molds for nanoimprint lithography by replica molding of high glass transition temperature polymers

Authors: Pisignano D., D’Amone S., Gigli G., Cingolani R.
Years: 2004
Source Title: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Doi: 10.1116/1.1767108
Venue: CNR Nanotec @ Lecce