Plasma surface engineering embraces a large range of processes aimed to drastically change the surface properties of materials preserving the bulk ones. This includes for instance corrosion protective coatings, barrier layers for food packaging, surface hydrophobization/hydrophilization, enhanced surface dyebility/printability or adhesion. In particular plasma-assisted deposition can be used to produce films on a solid material by promoting chemical reactions at the plasma/substrate interface. Indeed, by using sacrificial layers/substrates free standing nano-films can be produced. The processes can be performed by using both low and atmospheric pressure plasmas in direct and remote approach, injecting the film precursors in gas, vapor and aerosol form.