MWPECVD

Diamond Film Growth by MWPECVD Techique

(MicroWave Plasma Enhanced Chemical Vapor Deposition)

Chemical vapor deposition (CVD) processes assisted by plasmas, commonly known as plasma assisted CVD (PACVD) or plasma enhanced CVD (PECVD), are versatile in the production of materials with properties needful for the high-tech industries as microelectronic, optoelectronic, photovoltaic, biomaterials, food packaging, automobile, sensors. By choosing the right volatile monomers, also mixed with inert gases (Ar, He, etc.), and gases like H2, O2, N2, it is possible to deposit thin film having unique and reliable electrical, chemical and structural properties, on any vacuum compatible substrates.

In this research activity, undoped nanocrystalline (NCD) and polycrystalline diamond (PCD) films are deposited by microwave PECVD (MWPECVD) technique starting from gas mixtures of CH4 highly diluted (less than 5%) in Ar and H2, respectively.

The diamond has superior and unique physical properties such as extreme mechanical hardness, highest known thermal conductivity, broad optical transparency from the deep UV to the far IR radiations and chemical inertness to cite just a few. The last two and half decades have witnessed an increasing interest in synthetic NCD and PCD growth in film form by employing MWPECVD (see below) and HFCVD (Hot Filament CVD) techniques. The deposition process is in-situ monitored by Pyrometric (PI) and Laser Reflectance (LRI) Interferometries, and by Optical Emission Spectroscopy (OES).

For details see refs. [1,2,3,4,5,6,7,8,9,10]

mwpecvd_pl

Moreover, the active species produced in plasmas can modify the surface of materials preserving their bulk properties. Specifically, the H2 microwave plasma is used to hydrogenate the surface of diamond or diamond powder because the hydrogen coverage turns the positive electron affinity (PEA) in negative one (NEA). The NEA is responsible for the strong enhancement of photoemission when utilized as emitters.

 

NCD and PCD films are characterized by Raman spectroscopy, atomic force (AFM) and scanning electron (SEM) microscopies, and x-ray diffraction (XRD).

SEMmicroscopieS

Facilities & Labs

MWPECVD Laboratory @ Bari

People

Foto_GraziaCicala2Grazia

Cicala

CNR Senior Researcher

?Luciano

Velardi

Associate PostDoc

Publications

  1. G. S. Senesi, G. Cicala, Morphological characterization of diamond coatings grown by MWPECVD on hexagonal boron nitride, International Journal of Engineering Research & Science 1 9-19 (2015) ISSN: 2395-6992.
  2. G. Cicala, V. Magaletti, G.S. Senesi, G. Carbone, D. Altamura, C. Giannini, R. Bartali, Superior hardness and Young’s modulus of low temperature nanocrystalline diamond coatings, Mater Chem Phys, 144, 505-511, (2014) ISSN: 0254-0584; doi: 10.1016/j.matchemphys.2014.01.027.
  3. G. Cicala, V. Magaletti, G. S. Senesi, M. Tamborra, Smoothness improvement of micrometer and submicrometer-thick nanocrystalline diamond films produced by MWPECVD, J. Nanopart. Res., 15, 1549 (14pp), (2013) ISSN: 1388-0764; DOI 10.1007/s11051-013-1549-x.
  4. G. Cicala, Deposition of carbon based-materials by continuous and pulsed discharges, Surface Engineering, 28, 141-148, (2012) ISSN: 0267-0844; DOI 10.1179/1743294411Y.0000000080.
  5. G. Cicala, D. Monéger, D. Cornacchia, P.Pesce, V. Magaletti, G. Perna, V. Capozzi, M. Tamborra, Toward smooth MWPECVD diamond films: exploring the limits of the hydrogen percentage in Ar/H2/CH4 gas mixture, Surface & Coatings Technology 211 152-157 (2012) ISSN: 0257-8972; doi: 10.1016/j.surfcoat.2011.09.065.
  6. A. Gicquel, N. Derkaoui, C. Rond, F. Benedic, G. Cicala, D. Moneger, K. Hassouni, Quantitative analysis of diamond deposition reactor efficiency, Chemical Physics, 398, 239-247, (2012) ISSN: 0301-0104; doi: 10.1016/j.chemphys.2011.08.022.
  7. M. A. Nitti, G.Cicala, R.Brescia, A.Romeo, J.B.Guion, G. Perna, V.Capozzi, Mechanical Properties of MWPECVD Diamond Coatings on Si Substrate via Nanoindentation, Diamond and Related Materials, 20, 221-226, (2011) ISSN: 0925-9635; doi: 10.1016/j.diamond.2010.12.002.
  8. G. Cicala, R. Brescia, M.A. Nitti, A. Romeo, D. Altamura, C. Giannini, M. Capitelli, P. Spinelli, S. Schutzmann, Study of polycrystalline diamond deposition by continuous and pulsed discharges, Surface & Coatings Technology 204, 1884-1888, (2010) ISSN: 0257-8972; doi:10.1016/j.surfcoat.2009.09.001.
  9. G. Cicala, P. Bruno, F. Bénédic, F. Silva, K. Hassouni, G.S.Senesi, Nucleation, growth and characterization of nanocrystalline diamond films, Diamond Relat.Mater. 14, 421- 425, (2005) ISSN: 0925-9635; doi: 10.1016/j.diamond.2004.12.025.
  10. P. Bruno, F. Bénédic, A. Tallaire, F. J. Oliveira, M.S. Amaral, A. J. Fernandes, G. Cicala and R.F. Silva, Deposition of nanocrystalline diamond films on silicon nitride ceramic substrates using pulsed microwave discharges in Ar/H2/CH4 gas mixture” Diamond Rel. Mater. 14, 432-436, (2005) ISSN: 0925-9635; doi: 10.1016/j.diamond.2004.10.023.

Patents

1a. A. Valentini, D. Melisi, G. De Pascali, G. Cicala, L. Velardi, A. Massaro, High-efficiency nanodiamond-based ultraviolet photocathodes, 2016 (Patent n. WO 2017/051318). 

ABSTRACT

Method for the production of high efficiency photocathodes for ultraviolet based on nanodiamonds, comprising providing a support (10; 20, 21) capable of conducting electrons, and producing a photosensitive layer of nanodiamonds (30) on the support (10; 20, 21).

Production of the photosensitive layer includes providing nanodiamond particles in the form of powder, hydrogenating the nanoparticles in a H2 plasma, preparing a dispersion of the hydrogenated particles in a solvent, and spraying the dispersion onto the support and waiting for the solvent to evaporate from the support, the spray and waiting cycle being repeated several times in order to obtain a continuous photosensitive layer.

Projects

Progetto Partenariati Regionali per l’Innovazione – PUGLIA Fesr (2007-2013)
Development of a diamond film detector for ultraviolet radiation, Progetto Strategico ATS PS_136 of Regione Puglia, Italy (2007-2010)
APULIA SPACE: Esperti nell’uso di tecnologia abilitanti nel settore dello spazio,  PON03PE_00067_6, (2014-2016)

Latest News

Loretta del Mercato, si aggiudica l'ERC STARTING GRANT 2017

Loretta del Mercato, si aggiudica  l'ERC STARTING GRANT 2017

uno dei bandi più competitivi a livello europeo.

Lecce, 6 settembre 2017 

Lo European Research Council, che promuove la ricerca di eccellenza in Europa, nei giorni scorsi ha reso noti i nomi dei 406 vincitori della selezione ERC STARTING GRANT 2017, il bando tra i più competitivi a livello internazionale.

Su 3085 progetti presentati, 406 i progetti selezionati a cui sono stati destinati i 605 i milioni di euro di investimento. 48 le nazioni di provenienza dei ricercatori, soltanto 17 gli Italiani che condurranno le loro ricerche nel nostro paese, tra cui Loretta del Mercato, ricercatrice dell'Istituto di Nanotecnologia del Consiglio Nazionale delle Ricerche di Lecce.

Un importante riconoscimento alla ricerca nel settore della medicina di precisione condotta presso il CNR NANOTEC, un indiscusso premio al talento della giovane ricercatrice che, a 38 anni e un contratto a tempo determinato, sarà a capo del progetto "Sensing cell-cell interaction heterogeneity in 3D tumor models: towards precision medicine – INTERCELLMED".

Il progetto, il cui obiettivo è affrontare uno dei problemi più spinosi della ricerca sul cancro, ovvero la difficoltà nel trasformare i risultati delle ricerche scientifiche in applicazioni cliniche per i pazienti e che vedrà coinvolto l'Istituto tumori "Giovanni Paolo II" di Bari, si propone di sviluppare nuovi modelli in vitro 3D di tumore del pancreas, alternativi ai modelli animali, ingegnerizzati con un set di sensori nanotecnologici che consentiranno di monitorare le interazioni delle cellule tumorali con il loro micorambiente, verificare l'appropriatezza delle terapie prima della somministrazione ai pazienti oncologici e quindi prevedere la risposta dei singoli pazienti ad una o più terapie antitumorali.

La realizzazione di queste piattaforme 3D multifunzionali consentirà di superare le evidenti differenze intercorrenti tra "modelli animali" ed esseri umani fornendo dati attendibili ed in tempi più rapidi rispetto ai dati ottenuti tramite lunghi e costosi procedimenti di sperimentazione sugli animali. Le tecnologie e i modelli sviluppati saranno estesi anche ad altre forme di tumori solidi nonché impiegati per studi nell'ambito della ingegneria tissutale e della medicina rigenerativa.

Rassegna stampa e Video

Zeiss Microscopy Technology and Complete Correlative Workflow

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Zeiss Microscopy Technology and Complete Correlative Workflow

Lecce, Italy, 2017 Wednesday July 19th 

CNR NANOTEC @ Lecce, Aula Seminari – pal. G, Piano Terra

Program - PDF

Zeiss, as microscopy technology leader, provides the unique complete imaging solution ranging from light, confocal, electron, ion and Xray modalities with a complete and straightforward correlative workflow. An overview of different technologies will be presented with a special focus on X-Rray microscopy.

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MCS 2017

International Workshop on Micropropulsion and CubeSats

Bari, Italy, 26 - 27 June 2017

Program - MSC2017

This narrow-field, invited-only meeting is the first attempt to bring together the Materials and Micropropulsion communities with a view to contribute to the development of the Global Materials and Micropropulsion Roadmap, and set such meetings to a regular basis.