Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Authors: Bruno G., Losurdo M., Giangregorio M.M., Capezzuto P., Brown A.S., Kim T.-H., Choi S.
Years: 2006
Source Title:
Doi: 10.1016/j.apsusc.2006.05.129
Venue: NanoChem @ URT Bari