Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: Comparison of simulations with experiments

Authors: Diomede P., Economou D.J., Lafleur T., Booth J.-P., Longo S.
Years: 2014
Source Title: Plasma Sources Science and Technology
Doi: 10.1088/0963-0252/23/6/065049
Venue: P.LAS.M.I. Lab @ Bari