PLASMA ETCHING OF Si AND SiO//2 IN SF//6-O//2 MIXTURES.
PLASMA ETCHING OF Si AND SiO//2 IN SF//6-O//2 MIXTURES.
Authors: d’Agostino Riccardo, Flamm Daniel L.
Years: 1981
Source Title: Doi:10.1063/1.328468 Venue: NanoChem @ URT Bari
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