Plasma-enhanced chemical vapour deposition of microcrystalline silicon: On the dynamics of the amorphous-microcrystalline interface by optical methods

Authors: Summonte C., Rizzoli R., Desalvo A., Zignani F., Centurioni E., Pinghini R., Bruno G., Losurdo M., Capezzuto P., Gemmi M.
Years: 2000
Source Title:
Doi: 10.1080/014186300255113
Venue: NanoChem @ URT Bari