Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

Authors: Cicala G., Bruno P., Losacco A.M., Mattei G.
Years: 2004
Source Title: Surface and Coatings Technology
Doi: 10.1016/j.surfcoat.2003.10.044
Venue: P.LAS.M.I. Lab @ Bari