PECVD of fluorocarbon coatings from hexafluoropropylene oxide: Glow vs. afterglow

Authors: Intranuovo F., Sardella E., Rossini P., D’Agostino R., Favia P.
Years: 2009
Source Title:
Doi: 10.1002/cvde.200806755
Venue: NanoChem @ URT Bari