PECVD a-C:H films for STW resonant devices

Authors: Cicala G., Bruno P., Dragone A., Losacco A.M., Sadun C., Generosi A.
Years: 2005
Source Title: Thin Solid Films
Doi: 10.1016/j.tsf.2004.11.156
Venue: P.LAS.M.I. Lab @ Bari