Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

Authors: Augelli V., Murri R., Schiavulli L., Bruno G., Capezzuto P., Cramarossa F., Evangelisti F., Fortunato G.
Years: 1981
Source Title:
Doi: 10.1016/0040-6090(81)90344-8
Venue: NanoChem @ URT Bari