Optical absorption and electrical conductivity measurements of microcrystalline silicon layers grown by SiF4/H2 plasma on glass substrates

Authors: Ambrico M., Schiavulli L., Ligonzo T., Cicala G., Capezzuto P., Bruno G.
Years: 2001
Source Title:
Doi: 10.1016/S0040-6090(00)01582-0
Venue: NanoChem @ URT Bari