On the use of actinometric emission spectroscopy in SF6-O2 radiofrequency discharges: Theoretical and experimental analysis

Authors: d’Agostino R., Cramarossa F., De Benedictis S., Fracassi F., Laska L., Masek K.
Years: 1985
Source Title:
Doi: 10.1007/BF00615123
Venue: NanoChem @ URT Bari