Nanostructuring Si-C alloys by plasma enhanced chemical vapor deposition: An ellipsometry and Raman spectroscopy investigation

Authors: Giangregorio M.M., Losurdo M., Bianco G.V., Capezzuto P., Bruno G.
Years: 2011
Source Title:
Doi: 10.1016/j.tsf.2010.11.074
Venue: NanoChem @ URT Bari