Morphological and structural study of plasma deposited fluorocarbon films at different thicknesses

Authors: Cicala G., Milella A., Palumbo F., Favia P., d’Agostino R.
Years: 2003
Source Title:
Doi: 10.1016/S0925-9635(03)00293-0
Venue: NanoChem @ URT Bari