Microcrystalline silicon thin films grown at high deposition rate by PECVD

Authors: Ambrosone G., Coscia U., Lettieri S., Maddalena P., Ambrico M., Perna G., Minarini C.
Years: 2006
Source Title: Thin Solid Films
Doi: 10.1016/j.tsf.2005.12.110
Venue: P.LAS.M.I. Lab @ Bari