Metalorganic chemical vapor deposition of Er2O3 thin films: Correlation between growth process and film properties

Authors: Giangregorio M.M., Losurdo M., Sacchetti A., Capezzuto P., Bruno G.
Years: 2009
Source Title:
Doi: 10.1016/j.tsf.2008.10.041
Venue: NanoChem @ URT Bari