MECHANISMS OF ETCHING AND POLYMERIZATION IN RADIOFREQUENCY DISCHARGES OF CF//4-H//2, CF//4-C//2F//4, C//2F//6-H//2, C//3F//8-H//2.

Authors: d’Agostino R., Cramarossa F., Colaprico V., d’Ettole R.
Years: 1983
Source Title:
Doi: 10.1063/1.332193
Venue: NanoChem @ URT Bari