MASS AND ENERGY-SELECTED ION-BEAM FOR DEPOSITION AND ION-INDUCED SURFACE MODIFICATIONS

Authors: KUTTEL, OM; GROENING, P; AGOSTINO, RG; SCHLAPBACH, L
Years: 1995
Source Title: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Doi:
Venue: LiCryL @ Rende (CS)