Low stiffness tactile transducers based on AlN thin film and polyimide

Authors: Mastronardi V.M., Ceseracciu L., Guido F., Rizzi F., Athanassiou A., De Vittorio M., Petroni S.
Years: 2015
Source Title: Applied Physics Letters
Doi: 10.1063/1.4918749
Venue: CNR Nanotec @ Lecce