Deposition of nanocrystalline diamond films on silicon nitride ceramic substrates using pulsed microwave discharges in Ar/H2/CH4 gas mixture

Authors: Bruno P., Benedic F., Tallaire A., Silva F., Oliveira F.J., Amaral M., Fernandes A.J.S., Cicala G., Silva R.F.
Years: 2005
Source Title: Diamond and Related Materials
Doi: 10.1016/j.diamond.2004.10.023
Venue: P.LAS.M.I. Lab @ Bari