Insight into excimer laser crystallization exploiting ellipsometry: Effect of silicon film precursor

Authors: Losurdo M., Giangregorio M.M., Sacchetti A., Capezzuto P., Bruno G., Mariucci L., Fortunato G.
Years: 2007
Source Title:
Doi: 10.1016/j.tsf.2006.11.077
Venue: NanoChem @ URT Bari