Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Authors: Diomede P., Longo S., Economou D.J., Capitelli M.
Years: 2012
Source Title: Journal of Physics D: Applied Physics
Doi: 10.1088/0022-3727/45/17/175204
Venue: P.LAS.M.I. Lab @ Bari