Fully integrated three-axis Hall magnetic sensor based on micromachined structures

Authors: Sileo L., Todaro M.T., Tasco V., De Vittorio M., Passaseo A.
Years: 2010
Source Title: Microelectronic Engineering
Doi: 10.1016/j.mee.2009.11.160
Venue: CNR Nanotec @ Lecce