From low- k to ultralow- k thin-film deposition by organosilicon glow discharges

Authors: Milella A., Delattre J.L., Palumbo F., Fracassi F., D’Agostino R.
Years: 2006
Source Title:
Doi: 10.1149/1.2192729
Venue: NanoChem @ URT Bari