From amorphous to microcrystalline silicon: Moving from one to the other by halogenated silicon plasma chemistry

Authors: Bruno G., Capezzuto P., Giangregorio M.M., Bianco G.V., Losurdo M.
Years: 2009
Source Title:
Doi: 10.1080/14786430903070928
Venue: NanoChem @ URT Bari