Flexible piezoelectric cantilevers fabricated on polyimide substrate

Authors: Petroni S., Maruccio G., Guido F., Amato M., Campa A., Passaseo A., Todaro M.T., De Vittorio M.
Years: 2012
Source Title: Microelectronic Engineering
Doi: 10.1016/j.mee.2012.05.055
Venue: CNR Nanotec @ Lecce