Fabrication of BAW resonators based on piezoelectric AlN and reflector-on-membrane structure

Authors: Altamura D., Pomarico A., Epifani G., Ingrosso I., Todaro M.T., Tasco V., De Vittorio M., Passaseo A.
Years: 2009
Source Title: Ferroelectrics
Doi: 10.1080/00150190902987640
Venue: CNR Nanotec @ Lecce