Experimental investigation of powder formation in SiF4-H2 and SiH4-H2 r.f. discharges

Authors: Cicala G., Shakhatov A.V., De Pascale O., Capezzuto P., Bruno G.
Years: 1999
Source Title:
Doi: 10.1088/0963-0252/8/2/308
Venue: NanoChem @ URT Bari